Oxford Instruments Plasma Technology joins European Graphene Flagship funded pilot line

Oxford Instruments Bristol site

Oxford Instruments Plasma Technology, the Bristol-based supplier of plasma processing for high volume manufacturing and research and development, has joined the European Graphene Flagship funded “2D Experimental Pilot Line”.

Leading European semiconductor foundries and research institutions are working together to create the world’s first manufacturing line to bring two-dimensional (2D) materials enhanced semiconductor technologies from the laboratory into commercial devices.

Oxford Instruments is to be the exclusive Atomic Layer Deposition (ALD) hardware and process partner in this cross-European collaboration.

This programme is funded by the European Commission, which will invest 20 million euros over four years. Started on 1 October 2020, the project will establish a European ecosystem for prototype production of 2D materials-based electronics, photonics, and sensors.

2D materials have been proven to enable superior device performance across a wide range of applications such as sensors and photonics. The next step needed to bring these devices to market is to develop the processing flow for full wafers. Oxford Instruments is ideally positioned to help take the technology to the next level with a clear roadmap to single wafer plasma processing solutions on 200 mm wafers.

Oxford Instruments has successfully installed its Atomfab remote plasma ALD system at AMO Aachen in Aachen, Germany to support the manufacture of these devices on 200 mm wafers.

AMO’s director Prof. Max Lemme, said: “We are not merely talking about yet another tool, but about a strategic partnership between AMO and Oxford Instruments, with a dedicated Oxford Instruments scientist embedded at AMO to intensify the research and development on 2D materials. This close collaboration is a beautiful example for AMO’s mission to pursue technology transfer through joint R&D projects with industrial partners.”

Klaas Wisniewski, Strategic Business Development Director at Oxford Instruments Plasma Technology, added: “The equipment demand for next generation material devices has reached a new level. What is required are high-performance and at the same time cost-efficient solutions – criteria that cannot always be easily reconciled and can therefore only be implemented with superior process technology.

“We are therefore very pleased that this pioneering pilot line with access to the world leading device manufacturers will take full advantage of our advanced Atomfab ALD technology. By working together in such world leading consortia, we continue to build on our strategy of enabling the manufacture of high-performance devices by investing in promising technologies such as 2D materials today.”

Earlier this month Oxford Instruments Nanotechnology Tools Limited announced that it was building a new manufacturing facility at  Central Approach, Bristol.

New manufacturing facility to be built in Bristol for Oxford Instruments